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Jin-Goo Park

ProfessorJin-GooParkreceivedB.SdegreefromHanyangUniversity,Koreain1984andtheM.S.andPh.D.inmaterialsscienceandengineeringfromUniversityofArizonain1998and1993,respectively.From1992to1994,hewaswithTexasInstruments,Dallas,TX,wherehewasresponsibleformicrocontaminationcontrolinsemiconductorwetprocessingandDMD(DigitalMicromirrorDisplay)development.In1994,hejoinedHanyangUniversityERICA,whereheisnowaprofessorintheDepartmentofMaterialsEngineeringaswellasaDirectorofNano-bioElectronicMaterialsandProcessingLab(NEMPL).Hisresearchinterestsincludewafercleanings,chemicalmechanicalpolishingandnano-biofabrication.Hehasauthoredmorethan400technicalpublications/presentationsintheareaofwafercleanings,CMPand(bio-)MEMS.

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Professor Jin-Goo Park received B.S degree from Hanyang University, Korea in 1984 and the M.S. and Ph.D. in materials science and engineering from University of Arizona in 1998 and 1993, respectively. From 1992 to 1994, he was with Texas Instruments, Dallas, TX, where he was responsible for microcontamination control in semiconductor wet processing and DMD (Digital Micromirror Display) development. In 1994, he joined Hanyang University ERICA, where he is now a professor in the Department of Materials Engineering as well as a Director of Nano-bio Electronic Materials and Processing Lab (NEMPL). His research interests include wafer cleanings, chemical mechanical polishing and nano-bio fabrication. He has authored more than 400 technical publications/presentations in the area of wafer cleanings, CMP and (bio-)MEMS.

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