Susumu Sugiyama
SusumuSugiyama,Professor,ResearchOrganizationofScienceandTechnology,RitsumeikanUniversity;RepresentativeDirector,SupportOrganizationforResearchonIndustrialScienceandTechnologyResearch:MEMS,PiezoresistiveMechanicalSensorDevices,andLIGAProcessTechnologyhavebeenresearchedatResearchInstituteforMicroSystemTechnology.Recently,EnvironmentallyFriendlyPolymerMEMSProcessTechnologyhasbeenmainlystudied.TheresearchgroupisachievingmanypracticalresultsforSensors,Actuators,andProcessTechnologybythecollaborationwithindustries.